AIR SPRING MOUNT
An air spring with excellent vibration insulation efficiency, usually used for controlling low vibration of 1㎛ or less and low frequency vibration less than 1㎛. The air spring is usually used in ultra precision equipment such as semiconductor equipment as its natural frequency is low and there is no surging. Our company is developing various kinds of air spring mounts using air elasticity in order to make the air spring used in various equipment. By damping equipment in various ways, it is promoting dynamic safety and quick stability of equipment without the installation of dampers. VAM Type is a closed air spring, which can be used easily without air line connection. It is suitable for damping precision equipment as it has a low natural frequency of 2.0 Hz or less. With its long stroke, VAB Type has been developed to be suitable for the vibration isolation of equipment with occasional heavy vibration. In particular, VZD type can have a more excellent effect than an active system as it can acquire a natural frequency of 1 Hz or less by applying the principle of negative stiffness.